A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
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چکیده
منابع مشابه
A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoe t U e ©
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.10.056